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Published Date: 2025-12-11 | Pages: 183 | Tables: 199 | Electronics & Semiconductor
The global market for Semiconductor Process Automation was valued at US$ 10744 million in the year 2024 and is projected to reach a revised size of US$ 19472 million by 2031, growing at a CAGR of 8.5% during the forecast period.
Semiconductor Process Automation (SPA) essentially connects every critical step in wafer fabs and OSAT plants—tools, materials, process parameters and inspection data—into one data-driven control fabric. From a fab’s standpoint, SPA spans MES, APC, equipment data acquisition and analytics, automated material handling systems (AMHS), in-line inspection and metrology, increasingly augmented by AI and machine learning. Leading fabs at advanced nodes and in advanced packaging already integrate these subsystems into real-time digital twins and process-window control, so semiconductor process automation has shifted from a “nice-to-have” option to core infrastructure for yield, cycle time and labor efficiency.
From the supply side, the Semiconductor Process Automation market can be viewed in three layers. First is the horizontal platform layer: MES, dispatching, equipment integration and reporting platforms for 200 mm and 300 mm fabs and assembly/test sites, provided by both equipment majors and specialist software vendors. Second is the process control and inspection layer: automated optical inspection, CD metrology, chemical analytics and related APC, used to correct process drifts in real time. Third is the logistics and material-control layer, where AMHS hardware and material control systems (MCS) orchestrate FOUPs and carriers across tools and bays. Across these layers, players range from tool OEMs to automation software houses and system integrators. When evaluating semiconductor process automation, fabs tend to focus less on point features and more on the impact on OEE, cycle-time reduction, system uptime, compatibility with existing SECS/GEM or OPC UA interfaces, and robustness at full-scale 300 mm production.
Along the value chain, the upstream consists of sensors, industrial controls and networking/IT foundations. The midstream is populated by semiconductor-focused automation software and integration providers that deliver combined MES/APC, tool connectivity, AMHS/MCS and data platforms. Downstream, the main adopters are foundries, IDMs, OSATs and other ultra-clean manufacturing environments such as PV and power devices. Advanced fabs already bundle MES, APC, AMHS and AI algorithms into unified “intelligent fab” platforms for process-window optimization, yield ramp and energy management, while advanced packaging and test lines are catching up via automated binning, test-flow orchestration and closed-loop failure analysis. As a result, Semiconductor Process Automation increasingly spans not just one fab, but coordinated scheduling and demand-supply balancing across multiple sites and countries.
The current development stage can be summarized as “full automation for advanced lines, accelerated retrofit for mature ones.” New 300 mm logic and memory fabs are typically commissioned with high-level semiconductor process automation from day one, including advanced AMHS, real-time dispatching, in-line metrology and APC loops. Profitable 200 mm, specialty and OSAT lines, by contrast, focus on progressively eliminating stand-alone islands through equipment connectivity, data platforms and lighter-weight MES deployments. Recent M&A and partnership activity is reshaping the landscape: in 2025, for example, a major global services company acquired a specialist in semiconductor manufacturing automation software and consulting, folding its MES, equipment integration and analytics into a broader industrial digital offering; earlier deals around material control systems and AMHS software have tied intralogistics more tightly into process automation, while acquisitions in chemical metrology and in-line process control illustrate how metrology vendors are evolving into “inspection-plus-control” platforms. Together, these cases show Semiconductor Process Automation moving from single modules toward end-to-end solutions, with technology and services rapidly consolidated into larger platform players.
Looking ahead, the main trends and growth pockets in semiconductor process automation are converging. First, AI is being embedded deeply into APC, dispatching and maintenance, moving from rule-based automation toward self-learning and explainable process optimization. Second, AMHS and MCS will gain further prominence as 300 mm and giga-fab environments push for shorter WIP times via route optimization, lot-grouping strategies and cross-bay coordination. Third, fabs are evolving from single-site MES into multi-site digital twins and end-to-end visibility, placing process, equipment, supply-chain and energy data under one analytics and decision framework. Fourth, a vast installed base of 200 mm, specialty and OSAT factories creates demand for modular, fast-deploy automation bundles that connect tools, simplify reporting and deliver basic semiconductor process automation with minimal downtime. As new fabs and advanced packaging capacity ramp across North America, Europe and Asia, Semiconductor Process Automation is becoming not only a lever for yield and productivity, but also a key determinant of line resilience, workforce structure and regional competitiveness.
This report aims to provide a comprehensive presentation of the global market for Semiconductor Process Automation, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Semiconductor Process Automation.
The Semiconductor Process Automation market size, estimations, and forecasts are provided in terms of and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Semiconductor Process Automation market comprehensively. Regional market sizes, concerning products by Product, by Process, by Automation and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Semiconductor Process Automation companies, new entrants, and industry chain related companies in this market with information on the revenues for the overall market and the sub-segments across the different segments, by company, by Product, by Process, and by regions.
Market Segmentation
By Company
Siemens
Schneider Electric
ABB
Mitsubishi Electric
Rockwell Automation
Hitachi
Emerson
Bosch
Honeywell
FANUC
Danaher
KUKA
Keyence
Omron
Delta Electronics
Fuji Electric
Shenzhen Inovance Technology
Yokogawa Electric
SAP
LS Electric
IBM
Oracle
Parker Hannifin
Demig
Balluff
Brooks
JR Automation
RoviSys
Humphrey Automation
Onto Innovation
HollySys
Leadshine Technology
Segment by Product
Hardware
Software
Solution and Service
Segment by Automation
Fixed Automation
Programmable Automation
Flexible Automation
Segment by Process
Cleaning
Epitaxy
Thin Film Deposition
Photolithography
Etching
Ion Implantation/Doping
Chemical Mechanical Polishing (CMP)
Testing
Packaging
Others
By Region
North America
U.S.
Canada
Asia-Pacific
China
Japan
South Korea
Southeast Asia
India
Australia & New Zealand
Europe
Germany
France
U.K.
Italy
Ireland
Russia
Rest of Europe
Latin America
Mexico
Brazil
Argentina
Middle East & Africa
Israel
United Arab Emirates (UAE)
Saudi Arabia
Chapter Outline
Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by Product, by Process, by Automation etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
Chapter 2: Introduces executive summary of global market size, regional market size, this section also introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by companies in the industry, and the analysis of relevant policies in the industry.
Chapter 3: Detailed analysis of Semiconductor Process Automation company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 4: Provides the analysis of various market segments by Product, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 5: Provides the analysis of various market segments by Process, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 6, 7, 8, 9, 10: North America, Europe, Asia Pacific, Latin America, Middle East and Africa segment by country. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and capacity of each country in the world.
Chapter 11: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 12: The main points and conclusions of the report.
Research Methodology
The research methodology employed has been subjected by numerous procedures in order to guarantee the quality and accuracy of the data contained within the reports. The analysts are employed full-time and received more than six months training to satisfy the standard of our company. Our methodology can be divided into five stages:
★Stage 1 SECONDARY RESEARCH
The research team first collaborates with magazines, trade associations and administrative departments in the research field. The information provided by our internal documentation service is helpful for our further research. Our team has a wealth of experience and knowledge, and can effectively extract accurate information from existing resources.
★Stage 2 PRIMARY RESEARCH:INTERVIEWS WITH TRADE SOURCES
After the first stage, the research team conducts a large number of face-to-face or telephone interviews with representative companies working in the research field. Analysts are trying to have an opportunity to talk to leading companies and small companies in the field. Upstream suppliers, manufacturers, distributors, importers, installers, wholesalers and consumers were included in the interview. The data collected during the interview were then carefully examined and compared with the secondary study.
★Stage 3 ANALYSIS OF THE GATHERED DATA
The analysis team examines and synthesizes the data collected in the first two stages. In order to validate the data, a second round of interviews can be conducted.
★Stage 4 QUANTITATIVE DATA
The quantitative data such as market estimates, production and capacity of manufacturer, market forecasts and investment feasibility is provided by our company. The data is based on the estimates obtained during stage 3.
★Stage 5 QUALITY CONTROL
Before publishing, each report undergoes a rigorous review and editing process, which is done by the experience management team to ensure the reliability of the published data. Every analyst on the research team receives support and continuous training as part of our internal quality process.
1 Report Overview
1.1 Study Scope
1.2 Market Analysis by Product
1.2.1 Global Semiconductor Process Automation Market Size Growth Rate by Product: 2020 VS 2024 VS 2031
1.2.2 Hardware
1.2.3 Software
1.2.4 Solution and Service
1.3 Market by Automation
1.3.1 Global Semiconductor Process Automation Market Size Growth Rate by Automation: 2020 VS 2024 VS 2031
1.3.2 Fixed Automation
1.3.3 Programmable Automation
1.3.4 Flexible Automation
1.4 Market by Process
1.4.1 Global Semiconductor Process Automation Market Growth by Process: 2020 VS 2024 VS 2031
1.4.2 Cleaning
1.4.3 Epitaxy
1.4.4 Thin Film Deposition
1.4.5 Photolithography
1.4.6 Etching
1.4.7 Ion Implantation/Doping
1.4.8 Chemical Mechanical Polishing (CMP)
1.4.9 Testing
1.4.10 Packaging
1.5 Assumptions and Limitations
1.6 Study Objectives
1.7 Years Considered
2 Global Growth Trends
2.1 Global Semiconductor Process Automation Market Perspective (2020-2031)
2.2 Global Semiconductor Process Automation Growth Trends by Region
2.2.1 Global Semiconductor Process Automation Market Size by Region: 2020 VS 2024 VS 2031
2.2.2 Semiconductor Process Automation Historic Market Size by Region (2020-2025)
2.2.3 Semiconductor Process Automation Forecasted Market Size by Region (2026-2031)
2.3 Semiconductor Process Automation Market Dynamics
2.3.1 Semiconductor Process Automation Industry Trends
2.3.2 Semiconductor Process Automation Market Drivers
2.3.3 Semiconductor Process Automation Market Challenges
2.3.4 Semiconductor Process Automation Market Restraints
3 Competition Landscape by Key Players
3.1 Global Top Semiconductor Process Automation Players by Revenue
3.1.1 Global Top Semiconductor Process Automation Players by Revenue (2020-2025)
3.1.2 Global Semiconductor Process Automation Revenue Market Share by Players (2020-2025)
3.2 Global Top Semiconductor Process Automation Players by Company Type and Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
3.3 Global Key Players Ranking by Semiconductor Process Automation Revenue
3.4 Global Semiconductor Process Automation Market Concentration Ratio
3.4.1 Global Semiconductor Process Automation Market Concentration Ratio (CR5 and HHI)
3.4.2 Global Top 10 and Top 5 Companies by Semiconductor Process Automation Revenue in 2024
3.5 Global Key Players of Semiconductor Process Automation Head office and Area Served
3.6 Global Key Players of Semiconductor Process Automation, Product and Application
3.7 Global Key Players of Semiconductor Process Automation, Date of Enter into This Industry
3.8 Mergers & Acquisitions, Expansion Plans
4 Semiconductor Process Automation Breakdown Data by Product
4.1 Global Semiconductor Process Automation Historic Market Size by Product (2020-2025)
4.2 Global Semiconductor Process Automation Forecasted Market Size by Product (2026-2031)
5 Semiconductor Process Automation Breakdown Data by Process
5.1 Global Semiconductor Process Automation Historic Market Size by Process (2020-2025)
5.2 Global Semiconductor Process Automation Forecasted Market Size by Process (2026-2031)
6 North America
6.1 North America Semiconductor Process Automation Market Size (2020-2031)
6.2 North America Semiconductor Process Automation Market Growth Rate by Country: 2020 VS 2024 VS 2031
6.3 North America Semiconductor Process Automation Market Size by Country (2020-2025)
6.4 North America Semiconductor Process Automation Market Size by Country (2026-2031)
6.5 United States
6.6 Canada
7 Europe
7.1 Europe Semiconductor Process Automation Market Size (2020-2031)
7.2 Europe Semiconductor Process Automation Market Growth Rate by Country: 2020 VS 2024 VS 2031
7.3 Europe Semiconductor Process Automation Market Size by Country (2020-2025)
7.4 Europe Semiconductor Process Automation Market Size by Country (2026-2031)
7.5 Germany
7.6 France
7.7 U.K.
7.8 Italy
7.9 Russia
7.10 Ireland
8 Asia-Pacific
8.1 Asia-Pacific Semiconductor Process Automation Market Size (2020-2031)
8.2 Asia-Pacific Semiconductor Process Automation Market Growth Rate by Region: 2020 VS 2024 VS 2031
8.3 Asia-Pacific Semiconductor Process Automation Market Size by Region (2020-2025)
8.4 Asia-Pacific Semiconductor Process Automation Market Size by Region (2026-2031)
8.5 China
8.6 Japan
8.7 South Korea
8.8 Southeast Asia
8.9 India
8.10 Australia & New Zealand
9 Latin America
9.1 Latin America Semiconductor Process Automation Market Size (2020-2031)
9.2 Latin America Semiconductor Process Automation Market Growth Rate by Country: 2020 VS 2024 VS 2031
9.3 Latin America Semiconductor Process Automation Market Size by Country (2020-2025)
9.4 Latin America Semiconductor Process Automation Market Size by Country (2026-2031)
9.5 Mexico
9.6 Brazil
10 Middle East & Africa
10.1 Middle East & Africa Semiconductor Process Automation Market Size (2020-2031)
10.2 Middle East & Africa Semiconductor Process Automation Market Growth Rate by Country: 2020 VS 2024 VS 2031
10.3 Middle East & Africa Semiconductor Process Automation Market Size by Country (2020-2025)
10.4 Middle East & Africa Semiconductor Process Automation Market Size by Country (2026-2031)
10.5 Israel
10.6 Saudi Arabia
10.7 UAE
11 Key Players Profiles
11.1 Siemens
11.1.1 Siemens Company Details
11.1.2 Siemens Business Overview
11.1.3 Siemens Semiconductor Process Automation Introduction
11.1.4 Siemens Revenue in Semiconductor Process Automation Business (2020-2025)
11.1.5 Siemens Recent Development
11.2 Schneider Electric
11.2.1 Schneider Electric Company Details
11.2.2 Schneider Electric Business Overview
11.2.3 Schneider Electric Semiconductor Process Automation Introduction
11.2.4 Schneider Electric Revenue in Semiconductor Process Automation Business (2020-2025)
11.2.5 Schneider Electric Recent Development
11.3 ABB
11.3.1 ABB Company Details
11.3.2 ABB Business Overview
11.3.3 ABB Semiconductor Process Automation Introduction
11.3.4 ABB Revenue in Semiconductor Process Automation Business (2020-2025)
11.3.5 ABB Recent Development
11.4 Mitsubishi Electric
11.4.1 Mitsubishi Electric Company Details
11.4.2 Mitsubishi Electric Business Overview
11.4.3 Mitsubishi Electric Semiconductor Process Automation Introduction
11.4.4 Mitsubishi Electric Revenue in Semiconductor Process Automation Business (2020-2025)
11.4.5 Mitsubishi Electric Recent Development
11.5 Rockwell Automation
11.5.1 Rockwell Automation Company Details
11.5.2 Rockwell Automation Business Overview
11.5.3 Rockwell Automation Semiconductor Process Automation Introduction
11.5.4 Rockwell Automation Revenue in Semiconductor Process Automation Business (2020-2025)
11.5.5 Rockwell Automation Recent Development
11.6 Hitachi
11.6.1 Hitachi Company Details
11.6.2 Hitachi Business Overview
11.6.3 Hitachi Semiconductor Process Automation Introduction
11.6.4 Hitachi Revenue in Semiconductor Process Automation Business (2020-2025)
11.6.5 Hitachi Recent Development
11.7 Emerson
11.7.1 Emerson Company Details
11.7.2 Emerson Business Overview
11.7.3 Emerson Semiconductor Process Automation Introduction
11.7.4 Emerson Revenue in Semiconductor Process Automation Business (2020-2025)
11.7.5 Emerson Recent Development
11.8 Bosch
11.8.1 Bosch Company Details
11.8.2 Bosch Business Overview
11.8.3 Bosch Semiconductor Process Automation Introduction
11.8.4 Bosch Revenue in Semiconductor Process Automation Business (2020-2025)
11.8.5 Bosch Recent Development
11.9 Honeywell
11.9.1 Honeywell Company Details
11.9.2 Honeywell Business Overview
11.9.3 Honeywell Semiconductor Process Automation Introduction
11.9.4 Honeywell Revenue in Semiconductor Process Automation Business (2020-2025)
11.9.5 Honeywell Recent Development
11.10 FANUC
11.10.1 FANUC Company Details
11.10.2 FANUC Business Overview
11.10.3 FANUC Semiconductor Process Automation Introduction
11.10.4 FANUC Revenue in Semiconductor Process Automation Business (2020-2025)
11.10.5 FANUC Recent Development
11.11 Danaher
11.11.1 Danaher Company Details
11.11.2 Danaher Business Overview
11.11.3 Danaher Semiconductor Process Automation Introduction
11.11.4 Danaher Revenue in Semiconductor Process Automation Business (2020-2025)
11.11.5 Danaher Recent Development
11.12 KUKA
11.12.1 KUKA Company Details
11.12.2 KUKA Business Overview
11.12.3 KUKA Semiconductor Process Automation Introduction
11.12.4 KUKA Revenue in Semiconductor Process Automation Business (2020-2025)
11.12.5 KUKA Recent Development
11.13 Keyence
11.13.1 Keyence Company Details
11.13.2 Keyence Business Overview
11.13.3 Keyence Semiconductor Process Automation Introduction
11.13.4 Keyence Revenue in Semiconductor Process Automation Business (2020-2025)
11.13.5 Keyence Recent Development
11.14 Omron
11.14.1 Omron Company Details
11.14.2 Omron Business Overview
11.14.3 Omron Semiconductor Process Automation Introduction
11.14.4 Omron Revenue in Semiconductor Process Automation Business (2020-2025)
11.14.5 Omron Recent Development
11.15 Delta Electronics
11.15.1 Delta Electronics Company Details
11.15.2 Delta Electronics Business Overview
11.15.3 Delta Electronics Semiconductor Process Automation Introduction
11.15.4 Delta Electronics Revenue in Semiconductor Process Automation Business (2020-2025)
11.15.5 Delta Electronics Recent Development
11.16 Fuji Electric
11.16.1 Fuji Electric Company Details
11.16.2 Fuji Electric Business Overview
11.16.3 Fuji Electric Semiconductor Process Automation Introduction
11.16.4 Fuji Electric Revenue in Semiconductor Process Automation Business (2020-2025)
11.16.5 Fuji Electric Recent Development
11.17 Shenzhen Inovance Technology
11.17.1 Shenzhen Inovance Technology Company Details
11.17.2 Shenzhen Inovance Technology Business Overview
11.17.3 Shenzhen Inovance Technology Semiconductor Process Automation Introduction
11.17.4 Shenzhen Inovance Technology Revenue in Semiconductor Process Automation Business (2020-2025)
11.17.5 Shenzhen Inovance Technology Recent Development
11.18 Yokogawa Electric
11.18.1 Yokogawa Electric Company Details
11.18.2 Yokogawa Electric Business Overview
11.18.3 Yokogawa Electric Semiconductor Process Automation Introduction
11.18.4 Yokogawa Electric Revenue in Semiconductor Process Automation Business (2020-2025)
11.18.5 Yokogawa Electric Recent Development
11.19 SAP
11.19.1 SAP Company Details
11.19.2 SAP Business Overview
11.19.3 SAP Semiconductor Process Automation Introduction
11.19.4 SAP Revenue in Semiconductor Process Automation Business (2020-2025)
11.19.5 SAP Recent Development
11.20 LS Electric
11.20.1 LS Electric Company Details
11.20.2 LS Electric Business Overview
11.20.3 LS Electric Semiconductor Process Automation Introduction
11.20.4 LS Electric Revenue in Semiconductor Process Automation Business (2020-2025)
11.20.5 LS Electric Recent Development
11.21 IBM
11.21.1 IBM Company Details
11.21.2 IBM Business Overview
11.21.3 IBM Semiconductor Process Automation Introduction
11.21.4 IBM Revenue in Semiconductor Process Automation Business (2020-2025)
11.21.5 IBM Recent Development
11.22 Oracle
11.22.1 Oracle Company Details
11.22.2 Oracle Business Overview
11.22.3 Oracle Semiconductor Process Automation Introduction
11.22.4 Oracle Revenue in Semiconductor Process Automation Business (2020-2025)
11.22.5 Oracle Recent Development
11.23 Parker Hannifin
11.23.1 Parker Hannifin Company Details
11.23.2 Parker Hannifin Business Overview
11.23.3 Parker Hannifin Semiconductor Process Automation Introduction
11.23.4 Parker Hannifin Revenue in Semiconductor Process Automation Business (2020-2025)
11.23.5 Parker Hannifin Recent Development
11.24 Demig
11.24.1 Demig Company Details
11.24.2 Demig Business Overview
11.24.3 Demig Semiconductor Process Automation Introduction
11.24.4 Demig Revenue in Semiconductor Process Automation Business (2020-2025)
11.24.5 Demig Recent Development
11.25 Balluff
11.25.1 Balluff Company Details
11.25.2 Balluff Business Overview
11.25.3 Balluff Semiconductor Process Automation Introduction
11.25.4 Balluff Revenue in Semiconductor Process Automation Business (2020-2025)
11.25.5 Balluff Recent Development
11.26 Brooks
11.26.1 Brooks Company Details
11.26.2 Brooks Business Overview
11.26.3 Brooks Semiconductor Process Automation Introduction
11.26.4 Brooks Revenue in Semiconductor Process Automation Business (2020-2025)
11.26.5 Brooks Recent Development
11.27 JR Automation
11.27.1 JR Automation Company Details
11.27.2 JR Automation Business Overview
11.27.3 JR Automation Semiconductor Process Automation Introduction
11.27.4 JR Automation Revenue in Semiconductor Process Automation Business (2020-2025)
11.27.5 JR Automation Recent Development
11.28 RoviSys
11.28.1 RoviSys Company Details
11.28.2 RoviSys Business Overview
11.28.3 RoviSys Semiconductor Process Automation Introduction
11.28.4 RoviSys Revenue in Semiconductor Process Automation Business (2020-2025)
11.28.5 RoviSys Recent Development
11.29 Humphrey Automation
11.29.1 Humphrey Automation Company Details
11.29.2 Humphrey Automation Business Overview
11.29.3 Humphrey Automation Semiconductor Process Automation Introduction
11.29.4 Humphrey Automation Revenue in Semiconductor Process Automation Business (2020-2025)
11.29.5 Humphrey Automation Recent Development
11.30 Onto Innovation
11.30.1 Onto Innovation Company Details
11.30.2 Onto Innovation Business Overview
11.30.3 Onto Innovation Semiconductor Process Automation Introduction
11.30.4 Onto Innovation Revenue in Semiconductor Process Automation Business (2020-2025)
11.30.5 Onto Innovation Recent Development
11.31 HollySys
11.31.1 HollySys Company Details
11.31.2 HollySys Business Overview
11.31.3 HollySys Semiconductor Process Automation Introduction
11.31.4 HollySys Revenue in Semiconductor Process Automation Business (2020-2025)
11.31.5 HollySys Recent Development
11.32 Leadshine Technology
11.32.1 Leadshine Technology Company Details
11.32.2 Leadshine Technology Business Overview
11.32.3 Leadshine Technology Semiconductor Process Automation Introduction
11.32.4 Leadshine Technology Revenue in Semiconductor Process Automation Business (2020-2025)
11.32.5 Leadshine Technology Recent Development
12 Analyst's Viewpoints/Conclusions
13 Appendix
13.1 Research Methodology
13.1.1 Methodology/Research Approach
13.1.1.1 Research Programs/Design
13.1.1.2 Market Size Estimation
13.1.1.3 Market Breakdown and Data Triangulation
13.1.2 Data Source
13.1.2.1 Secondary Sources
13.1.2.2 Primary Sources
13.2 Author Details
13.3 Disclaimer
List of Tables
Table 1. Global Semiconductor Process Automation Market Size Growth Rate by Product (US$ Million): 2020 VS 2024 VS 2031
Table 2. Key Players of Hardware
Table 3. Key Players of Software
Table 4. Key Players of Solution and Service
Table 5. Global Semiconductor Process Automation Market Size Growth Rate by Automation (US$ Million): 2020 VS 2024 VS 2031
Table 6. Key Players of Fixed Automation
Table 7. Key Players of Programmable Automation
Table 8. Key Players of Flexible Automation
Table 9. Global Semiconductor Process Automation Market Size Growth by Process (US$ Million): 2020 VS 2024 VS 2031
Table 10. Global Semiconductor Process Automation Market Size by Region (US$ Million): 2020 VS 2024 VS 2031
Table 11. Global Semiconductor Process Automation Market Size by Region (2020-2025) & (US$ Million)
Table 12. Global Semiconductor Process Automation Market Share by Region (2020-2025)
Table 13. Global Semiconductor Process Automation Forecasted Market Size by Region (2026-2031) & (US$ Million)
Table 14. Global Semiconductor Process Automation Market Share by Region (2026-2031)
Table 15. Semiconductor Process Automation Market Trends
Table 16. Semiconductor Process Automation Market Drivers
Table 17. Semiconductor Process Automation Market Challenges
Table 18. Semiconductor Process Automation Market Restraints
Table 19. Global Semiconductor Process Automation Revenue by Players (2020-2025) & (US$ Million)
Table 20. Global Semiconductor Process Automation Market Share by Players (2020-2025)
Table 21. Global Top Semiconductor Process Automation Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Semiconductor Process Automation as of 2024)
Table 22. Ranking of Global Top Semiconductor Process Automation Companies by Revenue (US$ Million) in 2024
Table 23. Global 5 Largest Players Market Share by Semiconductor Process Automation Revenue (CR5 and HHI) & (2020-2025)
Table 24. Global Key Players of Semiconductor Process Automation, Headquarters and Area Served
Table 25. Global Key Players of Semiconductor Process Automation, Product and Application
Table 26. Global Key Players of Semiconductor Process Automation, Date of Enter into This Industry
Table 27. Mergers & Acquisitions, Expansion Plans
Table 28. Global Semiconductor Process Automation Market Size by Product (2020-2025) & (US$ Million)
Table 29. Global Semiconductor Process Automation Revenue Market Share by Product (2020-2025)
Table 30. Global Semiconductor Process Automation Forecasted Market Size by Product (2026-2031) & (US$ Million)
Table 31. Global Semiconductor Process Automation Revenue Market Share by Product (2026-2031)
Table 32. Global Semiconductor Process Automation Market Size by Process (2020-2025) & (US$ Million)
Table 33. Global Semiconductor Process Automation Revenue Market Share by Process (2020-2025)
Table 34. Global Semiconductor Process Automation Forecasted Market Size by Process (2026-2031) & (US$ Million)
Table 35. Global Semiconductor Process Automation Revenue Market Share by Process (2026-2031)
Table 36. North America Semiconductor Process Automation Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
Table 37. North America Semiconductor Process Automation Market Size by Country (2020-2025) & (US$ Million)
Table 38. North America Semiconductor Process Automation Market Size by Country (2026-2031) & (US$ Million)
Table 39. Europe Semiconductor Process Automation Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
Table 40. Europe Semiconductor Process Automation Market Size by Country (2020-2025) & (US$ Million)
Table 41. Europe Semiconductor Process Automation Market Size by Country (2026-2031) & (US$ Million)
Table 42. Asia-Pacific Semiconductor Process Automation Market Size Growth Rate by Region (US$ Million): 2020 VS 2024 VS 2031
Table 43. Asia-Pacific Semiconductor Process Automation Market Size by Region (2020-2025) & (US$ Million)
Table 44. Asia-Pacific Semiconductor Process Automation Market Size by Region (2026-2031) & (US$ Million)
Table 45. Latin America Semiconductor Process Automation Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
Table 46. Latin America Semiconductor Process Automation Market Size by Country (2020-2025) & (US$ Million)
Table 47. Latin America Semiconductor Process Automation Market Size by Country (2026-2031) & (US$ Million)
Table 48. Middle East & Africa Semiconductor Process Automation Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
Table 49. Middle East & Africa Semiconductor Process Automation Market Size by Country (2020-2025) & (US$ Million)
Table 50. Middle East & Africa Semiconductor Process Automation Market Size by Country (2026-2031) & (US$ Million)
Table 51. Siemens Company Details
Table 52. Siemens Business Overview
Table 53. Siemens Semiconductor Process Automation Product
Table 54. Siemens Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 55. Siemens Recent Development
Table 56. Schneider Electric Company Details
Table 57. Schneider Electric Business Overview
Table 58. Schneider Electric Semiconductor Process Automation Product
Table 59. Schneider Electric Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 60. Schneider Electric Recent Development
Table 61. ABB Company Details
Table 62. ABB Business Overview
Table 63. ABB Semiconductor Process Automation Product
Table 64. ABB Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 65. ABB Recent Development
Table 66. Mitsubishi Electric Company Details
Table 67. Mitsubishi Electric Business Overview
Table 68. Mitsubishi Electric Semiconductor Process Automation Product
Table 69. Mitsubishi Electric Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 70. Mitsubishi Electric Recent Development
Table 71. Rockwell Automation Company Details
Table 72. Rockwell Automation Business Overview
Table 73. Rockwell Automation Semiconductor Process Automation Product
Table 74. Rockwell Automation Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 75. Rockwell Automation Recent Development
Table 76. Hitachi Company Details
Table 77. Hitachi Business Overview
Table 78. Hitachi Semiconductor Process Automation Product
Table 79. Hitachi Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 80. Hitachi Recent Development
Table 81. Emerson Company Details
Table 82. Emerson Business Overview
Table 83. Emerson Semiconductor Process Automation Product
Table 84. Emerson Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 85. Emerson Recent Development
Table 86. Bosch Company Details
Table 87. Bosch Business Overview
Table 88. Bosch Semiconductor Process Automation Product
Table 89. Bosch Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 90. Bosch Recent Development
Table 91. Honeywell Company Details
Table 92. Honeywell Business Overview
Table 93. Honeywell Semiconductor Process Automation Product
Table 94. Honeywell Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 95. Honeywell Recent Development
Table 96. FANUC Company Details
Table 97. FANUC Business Overview
Table 98. FANUC Semiconductor Process Automation Product
Table 99. FANUC Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 100. FANUC Recent Development
Table 101. Danaher Company Details
Table 102. Danaher Business Overview
Table 103. Danaher Semiconductor Process Automation Product
Table 104. Danaher Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 105. Danaher Recent Development
Table 106. KUKA Company Details
Table 107. KUKA Business Overview
Table 108. KUKA Semiconductor Process Automation Product
Table 109. KUKA Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 110. KUKA Recent Development
Table 111. Keyence Company Details
Table 112. Keyence Business Overview
Table 113. Keyence Semiconductor Process Automation Product
Table 114. Keyence Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 115. Keyence Recent Development
Table 116. Omron Company Details
Table 117. Omron Business Overview
Table 118. Omron Semiconductor Process Automation Product
Table 119. Omron Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 120. Omron Recent Development
Table 121. Delta Electronics Company Details
Table 122. Delta Electronics Business Overview
Table 123. Delta Electronics Semiconductor Process Automation Product
Table 124. Delta Electronics Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 125. Delta Electronics Recent Development
Table 126. Fuji Electric Company Details
Table 127. Fuji Electric Business Overview
Table 128. Fuji Electric Semiconductor Process Automation Product
Table 129. Fuji Electric Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 130. Fuji Electric Recent Development
Table 131. Shenzhen Inovance Technology Company Details
Table 132. Shenzhen Inovance Technology Business Overview
Table 133. Shenzhen Inovance Technology Semiconductor Process Automation Product
Table 134. Shenzhen Inovance Technology Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 135. Shenzhen Inovance Technology Recent Development
Table 136. Yokogawa Electric Company Details
Table 137. Yokogawa Electric Business Overview
Table 138. Yokogawa Electric Semiconductor Process Automation Product
Table 139. Yokogawa Electric Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 140. Yokogawa Electric Recent Development
Table 141. SAP Company Details
Table 142. SAP Business Overview
Table 143. SAP Semiconductor Process Automation Product
Table 144. SAP Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 145. SAP Recent Development
Table 146. LS Electric Company Details
Table 147. LS Electric Business Overview
Table 148. LS Electric Semiconductor Process Automation Product
Table 149. LS Electric Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 150. LS Electric Recent Development
Table 151. IBM Company Details
Table 152. IBM Business Overview
Table 153. IBM Semiconductor Process Automation Product
Table 154. IBM Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 155. IBM Recent Development
Table 156. Oracle Company Details
Table 157. Oracle Business Overview
Table 158. Oracle Semiconductor Process Automation Product
Table 159. Oracle Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 160. Oracle Recent Development
Table 161. Parker Hannifin Company Details
Table 162. Parker Hannifin Business Overview
Table 163. Parker Hannifin Semiconductor Process Automation Product
Table 164. Parker Hannifin Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 165. Parker Hannifin Recent Development
Table 166. Demig Company Details
Table 167. Demig Business Overview
Table 168. Demig Semiconductor Process Automation Product
Table 169. Demig Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 170. Demig Recent Development
Table 171. Balluff Company Details
Table 172. Balluff Business Overview
Table 173. Balluff Semiconductor Process Automation Product
Table 174. Balluff Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 175. Balluff Recent Development
Table 176. Brooks Company Details
Table 177. Brooks Business Overview
Table 178. Brooks Semiconductor Process Automation Product
Table 179. Brooks Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 180. Brooks Recent Development
Table 181. JR Automation Company Details
Table 182. JR Automation Business Overview
Table 183. JR Automation Semiconductor Process Automation Product
Table 184. JR Automation Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 185. JR Automation Recent Development
Table 186. RoviSys Company Details
Table 187. RoviSys Business Overview
Table 188. RoviSys Semiconductor Process Automation Product
Table 189. RoviSys Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 190. RoviSys Recent Development
Table 191. Humphrey Automation Company Details
Table 192. Humphrey Automation Business Overview
Table 193. Humphrey Automation Semiconductor Process Automation Product
Table 194. Humphrey Automation Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 195. Humphrey Automation Recent Development
Table 196. Onto Innovation Company Details
Table 197. Onto Innovation Business Overview
Table 198. Onto Innovation Semiconductor Process Automation Product
Table 199. Onto Innovation Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 200. Onto Innovation Recent Development
Table 201. HollySys Company Details
Table 202. HollySys Business Overview
Table 203. HollySys Semiconductor Process Automation Product
Table 204. HollySys Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 205. HollySys Recent Development
Table 206. Leadshine Technology Company Details
Table 207. Leadshine Technology Business Overview
Table 208. Leadshine Technology Semiconductor Process Automation Product
Table 209. Leadshine Technology Revenue in Semiconductor Process Automation Business (2020-2025) & (US$ Million)
Table 210. Leadshine Technology Recent Development
Table 211. Research Programs/Design for This Report
Table 212. Key Data Information from Secondary Sources
Table 213. Key Data Information from Primary Sources
Table 214. Authors List of This Report
List of Figures
Figure 1. Semiconductor Process Automation Picture
Figure 2. Global Semiconductor Process Automation Market Size Comparison by Product (2020-2031) & (US$ Million)
Figure 3. Global Semiconductor Process Automation Market Share by Product: 2024 VS 2031
Figure 4. Hardware Features
Figure 5. Software Features
Figure 6. Solution and Service Features
Figure 7. Global Semiconductor Process Automation Market Size Comparison by Automation (2020-2031) & (US$ Million)
Figure 8. Fixed Automation Features
Figure 9. Programmable Automation Features
Figure 10. Flexible Automation Features
Figure 11. Global Semiconductor Process Automation Market Size by Process (2020-2031) & (US$ Million)
Figure 12. Global Semiconductor Process Automation Market Share by Process: 2024 VS 2031
Figure 13. Cleaning Case Studies
Figure 14. Epitaxy Case Studies
Figure 15. Thin Film Deposition Case Studies
Figure 16. Photolithography Case Studies
Figure 17. Etching Case Studies
Figure 18. Ion Implantation/Doping Case Studies
Figure 19. Chemical Mechanical Polishing (CMP) Case Studies
Figure 20. Testing Case Studies
Figure 21. Packaging Case Studies
Figure 22. Semiconductor Process Automation Report Years Considered
Figure 23. Global Semiconductor Process Automation Market Size (US$ Million), Year-over-Year: 2020-2031
Figure 24. Global Semiconductor Process Automation Market Size, (US$ Million), 2020 VS 2024 VS 2031
Figure 25. Global Semiconductor Process Automation Market Share by Region: 2024 VS 2031
Figure 26. Global Semiconductor Process Automation Market Share by Players in 2024
Figure 27. Global Semiconductor Process Automation Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
Figure 28. The Top 10 and 5 Players Market Share by Semiconductor Process Automation Revenue in 2024
Figure 29. North America Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 30. North America Semiconductor Process Automation Market Share by Country (2020-2031)
Figure 31. United States Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 32. Canada Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 33. Europe Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 34. Europe Semiconductor Process Automation Market Share by Country (2020-2031)
Figure 35. Germany Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 36. France Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 37. U.K. Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 38. Italy Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 39. Russia Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 40. Ireland Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 41. Asia-Pacific Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 42. Asia-Pacific Semiconductor Process Automation Market Share by Region (2020-2031)
Figure 43. China Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 44. Japan Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 45. South Korea Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 46. Southeast Asia Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 47. India Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 48. Australia & New Zealand Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 49. Latin America Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 50. Latin America Semiconductor Process Automation Market Share by Country (2020-2031)
Figure 51. Mexico Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 52. Brazil Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 53. Middle East & Africa Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 54. Middle East & Africa Semiconductor Process Automation Market Share by Country (2020-2031)
Figure 55. Israel Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 56. Saudi Arabia Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 57. UAE Semiconductor Process Automation Market Size YoY Growth (2020-2031) & (US$ Million)
Figure 58. Siemens Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 59. Schneider Electric Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 60. ABB Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 61. Mitsubishi Electric Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 62. Rockwell Automation Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 63. Hitachi Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 64. Emerson Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 65. Bosch Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 66. Honeywell Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 67. FANUC Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 68. Danaher Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 69. KUKA Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 70. Keyence Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 71. Omron Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 72. Delta Electronics Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 73. Fuji Electric Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 74. Shenzhen Inovance Technology Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 75. Yokogawa Electric Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 76. SAP Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 77. LS Electric Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 78. IBM Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 79. Oracle Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 80. Parker Hannifin Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 81. Demig Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 82. Balluff Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 83. Brooks Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 84. JR Automation Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 85. RoviSys Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 86. Humphrey Automation Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 87. Onto Innovation Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 88. HollySys Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 89. Leadshine Technology Revenue Growth Rate in Semiconductor Process Automation Business (2020-2025)
Figure 90. Bottom-up and Top-down Approaches for This Report
Figure 91. Data Triangulation
Figure 92. Key Executives Interviewed
